MIS – Field Effect Sensors for Low Concentration of H2S for Environmental Monitoring
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چکیده
It was found, that Metal Insulator Semiconductor Field Effect (MIS-FE) sensors with structures Pd-Si3N4-SiO2-Si and Pd-Ta2O5SiO2-Si have sufficient concentration resolution to H2S gas and acceptable response time in mixture of H2S gas with air. Results of MIS-FE gas sensor operation in periodic regime are presented and allow us to be sure, that low detection level of H2S for MISFE sensor with Ta2O5-SiO2 insulator is of about 5 ppb. © 2009 Published by Elsevier Ltd.
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تاریخ انتشار 2015